High-resolution, Non-destructive X-ray Tomography

Highlights of Analytical Sciences in Switzerland

Authors

  • Mirko Holler Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
  • Jörg Raab Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
  • Oliver Bunk Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
  • Ana Diaz Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
  • Elisabeth Müller Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
  • Roberto Dinapoli Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
  • Michal Odstrcil Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
  • Esther H. R. Tsai Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
  • Manuel Guizar-Sicairos Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland
  • Gabriel Aeppli Paul Scherrer Institut, CH-5232 Villigen PSI, Switzerland. mirko.holler@psi.ch

DOI:

https://doi.org/10.2533/chimia.2018.339

Keywords:

Integrated circuits, Nano tomography, Ptychography, X-ray imaging

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Published

2018-05-30