Microlithographic Layers

Abstract

Microlithography is a highly precise pattern-transfer technique, needed for the manufacturing of semiconductor devices. In the microlithographic process, the image of a mask is transferred to a light-sensitive polymer film, a so-called photoresist. Photoresists consist of light-sensitive organic polymers, which are able to resolve submicrometer patterns. They are highly specified materials, having well-defined physical and mechanical properties, and are mainly composed of a linear organic polymer, a photoacid generator, and a solvent.