Quality Aspects in Production of Electronic Grade Chemicals in Multipurpose Plants

Abstract

Electronic devices and displays require electronic grade chemicals for their manufacturing process. As miniaturisation in the electronics industry has pushed the boundaries of physics, no contamination can be tolerated in the production of microchips or display panels. Electronic grade chemicals need to be of highest purity and quality consistency. After giving an introduction to the quality requirements in the electronics industry, this article describes the path from laboratory synthesis to a capable production process of a small volume electronic specialty material in a multipurpose plant. The upscaling of an electronic chemical for electronic device manufacturing is one of the examples of how products with high quality requirements can be successfully produced in an existing production infrastructure.